| 潔淨度 Clean Grade | Class 100 | |||
| 外部尺寸 External DIM WxDxH (mm) | 1000x840x1520 | 1300x840x1520 | 1910x840x1520 | |
| 內部尺寸 Inner DIM W1xD1xH1 (mm) | 900x580x580 | 1200x580x580 | 1800x580x580 | |
| 風速 Air Velocity (m/s) | 0.45 m/s ± 20% | |||
| 結構 Meterial | 本體 Body | 冷作鋼板烤漆,不鏽鋼板 | ||
| 作業檯 Table | 不鏽鋼板 | |||
| 照明 Lighting | 20Wx2 | 30Wx2 | 40Wx2 | |
| 集塵效率 Efficiency | Over 99.99% 0.3μm D.O.P Test | |||
| 濾網尺寸 HEPA DIM | 915x610x70 | 1220x610x70 | 1830x610x70 | |
| 消耗電力 Power consumption | 0.4 KW | 0.4 KW | 0.6 KW | |
 
 
